The Study of ISFETs with Multiple Nano Channels
碩士 === 國立暨南國際大學 === 電機工程學系 === 99 === In this thesis, the multiple nano-channel ISFET were fabricated by combing UV nano imprint and conventional photolithography. The multiple nano-channels were fabricated by UV NIL and reactive ion etching. Then, the ISFET were fabricated. The electrical charact...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90778147522614268911 |