Fabrication of sealed nonuniform SU-8 microchannels by a novel double-side partial-exposure method
碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程組 === 99 === Here a novel process is proposed to fabricate sealed micro channels by using negative photoresist SU-8. In previous studies, fabricating sealed micro channels needs either wafer bonding or multiple photoresist coating. The proposed method needs only SU...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45266833370233923552 |