Fabrication of a-plane dot patterned sapphire substrate for the growth of GaN-based LED
碩士 === 國立交通大學 === 材料科學與工程學系 === 99 === This study is to improve the performance of GaN-based LED. The effects of patterned sapphire substrate were investigated. A new process is proposed to pattern a-plane sapphire substrate, follow by the growth of LED structures. By the control of etching paramete...
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| Format: | Others |
| Language: | zh-TW |
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2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37033228600298258697 |