Development of metal-assisted nano-stacks and their applications in high performance TFT-NVM
博士 === 國立交通大學 === 材料科學與工程學系 === 99 === This work was to develop various metal-assisted nano-gate stacks on Si wafer, including SiO2/Ir-NCs/SiO2/Si-Sub, SiO2/Ir-NCs/Si3N4/SiO2/Si-Sub, SiO2/Ir-silicide- NCs/SiO2/Si-Sub, SiO2/Ir-NCs/SiO2/Si3N4/Poly-Si, SiO2/Ni-NCs/Si3N4/SiO2/Poly-Si, SiO2/Si3N4/Ni-NCs/...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94222535634588058666 |