A Study on Nickel-induced Lateral Crystallization of Amorphous Silicon by Spin-coating Method
碩士 === 國立交通大學 === 材料科學與工程學系 === 99 === The purpose of this research is to develop an easy and low cost method of metal-induced lateral crystallization (MILC) of amorphous silicon film. This method can obtain the less residual nickel content in poly-crystallization silicon than other method, such as...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46090361613729874367 |