Investigation on Opto-electrical Properties and Thermal Stability of Zinc Oxide Based Transparent Conductive Oxides Prepared by Atmospheric Pressure Plasma Jet
碩士 === 國立交通大學 === 電子研究所 === 99 === In this thesis, we use the APPCVD system to deposit the ZnO based transparent conductive oxides (TCO), including IZO, AZO and GZO. The effect of different doping concentration and substrate temperature on the morphological, structural, electrical and optical proper...
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49814308300299820102 |