Fabrication and Characterization of a-IGZO Thin Film Transistors
碩士 === 國立交通大學 === 電子研究所 === 99 === In this thesis, we have successfully fabricated a-IGZO TFTs by depositing the channel films with a radio frequency (RF) sputter. Because the RF sputters have merits of low manufacture temperature and good uniformity on a large scale, making this deposition techniqu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55568073519998544330 |