A Study on Gas Sensor Applications of Suspended-Nanowire-Channel TFTs and the Characterization of Suspended-Gate Vertical-MOSFETs
碩士 === 國立交通大學 === 電子研究所 === 99 === In this thesis, we have successfully fabricated two kinds of devices including the suspended-NW-channel TFTs and the SG vertical-MOSFETs. The sidewall spacer NW in suspended-NW-channel TFTs and the sidewall spacer gate electrode in the vertical channel of SG v...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/37696660453981582274 |