Design, Implementation and Measurement of a MEMS Type Gas Sensor with SnO2 Sensing Film Prepared by Liquid Phase Deposition Method
碩士 === 國立交通大學 === 電控工程研究所 === 99 === In this thesis, a micro H2S gas sensor with liquid phase deposition (LPD) based sensing film on the micro hotplate, was successfully implemented by utilizing MEMS fabrication technology. Versatile advantages including miniaturized structure, low-power consumption...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10803727673561292010 |