Design, Implementation and Measurement of a MEMS Type Gas Sensor with SnO2 Sensing Film Prepared by Liquid Phase Deposition Method
碩士 === 國立交通大學 === 電控工程研究所 === 99 === In this thesis, a micro H2S gas sensor with liquid phase deposition (LPD) based sensing film on the micro hotplate, was successfully implemented by utilizing MEMS fabrication technology. Versatile advantages including miniaturized structure, low-power consumption...
Main Authors: | Huang, Yen-Chi, 黃彥期 |
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Other Authors: | Chiou, Jin-Chern |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/10803727673561292010 |
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