MEMS based Flexible Surface Electrode for ECoG Measurement
碩士 === 國立交通大學 === 電控工程研究所 === 99 === In this thesis, the implementation and characterization of a MEMS-based flexible surface electrode utilizing parylene-C as substrate was presented for ECoG measurement applications. An un-symmetric sandwich-type structure consists of two parylene layer (10um subs...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/69426506394205652182 |