MEMS based Flexible Surface Electrode for ECoG Measurement

碩士 === 國立交通大學 === 電控工程研究所 === 99 === In this thesis, the implementation and characterization of a MEMS-based flexible surface electrode utilizing parylene-C as substrate was presented for ECoG measurement applications. An un-symmetric sandwich-type structure consists of two parylene layer (10um subs...

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Bibliographic Details
Main Authors: Wang, Yung-Feng, 王詠鋒
Other Authors: Chiou, Jin-Chern
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/69426506394205652182

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