The Development of High Sensitivity Porously SnO2 Gas Sensor Using Liquid Phase Deposition Fabrication Process
博士 === 國立交通大學 === 電控工程研究所 === 99 === MEMS-based gas sensors with porously SnO2 sensing film have been studied extensively due to their have advantages including miniaturized structure, low-power consumption, high sensitivity and short response time. Sensitivity and response time of the sensing film...
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93912182819641740980 |