Testing and improvement of a single-chip dual-axial capacitive micro accelerometer
碩士 === 國立交通大學 === 機械工程學系 === 99 === Based on the previous design of our group, with symmetric coil-type suspension in the micro accelerometer, here the fabrication process is further improved, sensing circuit and MEMS structure are integrated, and the electrical output signal are measured for the de...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97540516814488955802 |