Elimination of Silicon Nodule Defects in Shadow Trench Isolation
碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 99 === Shallow trench silicon as the semiconductor manufacturing process is the process of isolation transistors on and off the function, but experience in the manufacturing process to product defects will affect the stability and quality,this paper is t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29101672016741341449 |