Safety Assessment of Second-Hand Semiconductor Process Tools ─Case Study for Wet Bench
碩士 === 國立交通大學 === 工學院碩士在職專班產業安全與防災組 === 99 === As manufacturing technology advances, investment in the construction of wafer FAB is large. In the past, to build an 8” FAB requires NTD 30 billion yuan, and now to build a 12” FAB requires at least NTD 100 billion yuan. Among the investment in the semi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35616845990259883485 |