Planning and Design of Explosion Prevention Zones for the Semiconductor Fab
碩士 === 國立交通大學 === 工學院產業安全與防災學程 === 99 === In view of the fact that all of the current 12-inch semiconductor plants have exploited limited land space for the installing of precise and sophisticated equipments, and they have made extensively use of combustible and inflammable liquids (such as IPA, pho...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09254504229335127935 |