The study of sol-gel-derived ZrO2 sensing film based on electrolyte–insulator–semiconductor for pH detection and urea biosensing
碩士 === 國立交通大學 === 奈米科技研究所 === 99 === ISFET( Ion-sensitive Field Effect Transistor ) was first developed by Bergveld in 1970s, and because of its small size, fast response, rigidity and compatibility with standard CMOS process, ISFET is an attractive candidate of modern sensor device. By studying...
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17421890431870399259 |