Fabrication and measuring analysis of low thermal conductivity thin film with multi-layered Ge quantum dots array
碩士 === 國立中央大學 === 電機工程研究所 === 99 === The study of this thesis is that using the method of selective oxidation of SiGe, to form multi-layered Ge quantum dots (QDs) array embedded in dielectric thin film such as SiO2 or Si3N4. By use of the low dimensional property of Ge QD itself and changing the amb...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86786011905367968450 |