Study of thermal stress-induced layer transfer from single-crystal silicon thin film on sapphire substrate
碩士 === 國立中央大學 === 機械工程研究所 === 99 === Silicon on sapphire can be applied to Optical Engineering, communications, semiconductor, and thin film solar cell, because good sapphire for the substrate can epitaxial high quality silicon layer. The most well-known silicon film layer transfer technique is th...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44816923091231894751 |