The study of porous silicon thin-film transfer
碩士 === 國立中央大學 === 機械工程研究所 === 99 === In the semiconductor manufacturing technology which follows the Moor''s law in the past. The development of the semiconductor industry has entered the nanoscale processes. As the size of devices are manufactured to be much smaller, some problems come up...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08622474566393561008 |