A study of etch the anisotropic of quartz microstructures
碩士 === 國立中央大學 === 機械工程研究所 === 99 === It’s had to come to maturity in micromechanics and microengineering, but the proportion of quartz wafer is less than silicon wafer in use. It’s gradually increasing the proportion of quartz wafer, cause the physical properties and characteristics of its materials...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53807240336943749364 |