Growth of Thick GaN Layers on GaN Nanorod Template by HVPE
碩士 === 國立中央大學 === 光電科學研究所 === 99 === In this research, we used horizontal system of home-made hydride vapor phase epitaxy (HVPE) to growth thick GaN films on 2μm un-doped GaN/ sapphire substrate. We changed the growth parameters, for example, using different carrier gas, changing V/III ratio and car...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14322606400621789852 |