Phase Shifting Imaging Ellipsometer
碩士 === 國立中央大學 === 光電科學研究所 === 99 === In this thesis, a phase shifting imaging ellipsometer (PSIE) is developed and set up for two-dimensionally measuring ellipsometric parameters of a tested specimen. In the optical setup of the PSIE, a liquid crystal variable retarder (LCVR) is employed to change t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/44045714315676809427 |