Research of Thermal Stability on Hydrogen doped Al-doped Zinc Oxide Transparent Conductive Film
碩士 === 國立中央大學 === 光電科學研究所 === 99 === An Al-doped zinc oxide (AZO) transparent conductive film is deposited on glass by pulsed DC magnetron sputtering. We change the H2 flows during the deposition processes to investigate the change of the electrical and optical properties through the different H2 fl...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/80336941844890983340 |