Research on Sol-Gel CMOS MEMS Gas Sensor
碩士 === 國立彰化師範大學 === 積體電路設計研究所 === 99 === Abstract Because of the rapid industrial and technological development, air pollution was getting worse. People increase the demand for gas sensors day by day. Nowadays many researches study for sensors, the application of gas sensors is increasingly being us...
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| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90138855830225953062 |