Measurement of small displacements by the use of multiple beam interferometry

碩士 === 國立彰化師範大學 === 機電工程學系 === 99 === The thesis proposes a method for measuring small displacements based on the characteristic of multiple beam interference and heterodyne interferometric technique. When a p-polarized light beam is obliquely incident into a special apparatus, consisting of a paral...

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Bibliographic Details
Main Authors: Cheng-Yu Tsai, 蔡承育
Other Authors: 林俊佑
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/15542043681534963150