Measurement of small displacements by the use of multiple beam interferometry
碩士 === 國立彰化師範大學 === 機電工程學系 === 99 === The thesis proposes a method for measuring small displacements based on the characteristic of multiple beam interference and heterodyne interferometric technique. When a p-polarized light beam is obliquely incident into a special apparatus, consisting of a paral...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
|
Online Access: | http://ndltd.ncl.edu.tw/handle/15542043681534963150 |