Annealing effect on structure and mechanical properties of AlxCoCrCuFeNi multi-element oxide films
碩士 === 國立東華大學 === 材料科學與工程學系 === 99 === In this thesis, AlxCoCrCuFeNi (x=0, 1, 2, 3, 4, ∞) oxide films were prepared by reactive co-sputtering under different O2/Ar ratio (R=0.5 and 1) using a tri-cathode sputtering system. When R=0.5 with low x value, the as-deposited films are in cubic-spinel s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26464487593947574231 |