Application Research on a Contact-type Measuring Device Using Linear Motors and Interferometry System
碩士 === 國立高雄第一科技大學 === 機械與自動化工程研究所 === 99 === In this study, a contact-type profile measuring device using XY-table driven by linear motors and laser interferometry system for profile measurements of precision optical lens is presented. The measuring device consists of an XY-table actuated by linear...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79398043492810953209 |