Application Research on a Contact-type Measuring Device Using Linear Motors and Interferometry System

• Main Authors: Han-Lin Wu, 吳翰林
• Other Authors: Yung-Tien Liu
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/79398043492810953209

碩士 === 國立高雄第一科技大學 === 機械與自動化工程研究所 === 99 === In this study, a contact-type profile measuring device using XY-table driven by linear motors and laser interferometry system for profile measurements of precision optical lens is presented. The measuring device consists of an XY-table actuated by linear motors, a two-frequency laser interferometry system, an active contact-type measuring probe driven by piezoelectric (PZT) actuators, and a displacement sensor for detecting the deflection of the measuring probe. In previous studies, the fundamental characteristics including the effectiveness of the optical path for measurement, and error compensation for the laser interferometry system were verified. The purpose of this paper is to configure a contact-type profile measuring device using XY-table driven by linear motors. The static and dynamic characteristics of the measuring device were examined through series experiments including the motion behaviors of the XY-table driven by linear motors, design and analysis of an active-type measuring probe using finite element method (FEM), the displacement characteristics of the measuring probe driven by PZT actuators. According to the characteristics of the measuring probe, a control system having a constant measuring force specified by 100 mgf (1 mN) was configured. The active probe control system was then integrated to the XY table to form a dual-servo control system that featured a long measuring range based on XY-table and the measuring accuracy determined by the laser interferometry system. The performance of the dual-servo control system was examined by the profile measurement of an aspheric die made of oxygen-free copper (OFC). The measured result was compared with that measured by commercial available Alpha-Step IQ. The maximum error, mean error and root-mean-square (RMS) error were obtained as 1.451 ?慆, 0.49 ?慆 and 0.55 ?慆, respectively. According to the experimental examinations, the foundation of contact-type measuring device using linear motors and interferometry system for profile measurement was demonstrated.