Ferrofluidic Micropump
碩士 === 國立屏東科技大學 === 材料工程所 === 99 === This study presents develops one kind by the ferrofluidic the micropump which makes for the actuation source. In the experiment processes, replace for photolithography by the CO2 laser process, reduces the experiment cost also to speed up the manufacturing time....
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/61610112476657422445 |