| Summary: | 碩士 === 國立屏東科技大學 === 材料工程所 === 99 === This study presents develops one kind by the ferrofluidic the micropump which makes for the actuation source. In the experiment processes, replace for photolithography by the CO2 laser process, reduces the experiment cost also to speed up the manufacturing time. In the CO2 laser processing, improve channel roughness by different laser power and laser processing speed focus processing, then a lower laser power and faster processing speed of defocus processing. The chips processed after the proceed heat treatment, better channel quality can reduces the pump's resistance cause the pump flow rate to be bigger. Using defocus and heat treatment can channel middle line average roughness reach 5 ~ 6 nm.
This experiment uses the ferrofluidic is the oil base ferrofluidic, not and the water mix, the use and the water does not mix the characteristic, will cause when channel ferrofluidic migration may achieve pushes the fluid the function. The pump work the way, is mainly permanent magnet by the stepper motor to actuate movable ferrofluidic, on the chip stationary permanent magnet,acts as a closed valve between the inlet and outlet chambers, uses the movable ferrofluidic to pushing the fluid to form a pump mechanism. Surveying the pump each minute flow rate and the pump can push the altitude. The pump channel quality is good, motor speeds 8 rpm the maximum flow rate achieved was 47 μl/min. The maximum head pressure achieved was 95 (mm H2O). Tangent design micropump, motor speed of 4 and 8 rpm, the volumetric flow rate is 14 μl/min and 56 μl/min.
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