Investigation of Charge Trapping Characteristic and Reliability Issues for High-k/Metal gate MOSFETs

碩士 === 國立中山大學 === 物理學系研究所 === 99 === Electronic devices such as high power devices, microprocessors and memories in integrated circuit are primarily composed of metal-oxide-semiconductor field effect transistors (MOSFETs), due to the advantages of low cost, low power consumption and easy to scale do...

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Bibliographic Details
Main Authors: Jou-Miao Shih, 施柔妙
Other Authors: Ting-Chang Chang
Format: Others
Language:en_US
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/73320578482266040514