Development of a Silicon-based Suspending Micro-thermoelectric Generator with Series Array Structure Using Surface Micromachining Technology
碩士 === 國立中山大學 === 電機工程學系研究所 === 99 === This thesis aimed to develop a novel micro thermal electric generator (μ-TEG) with a series-array bridge microstructure utilizing microelectromechanical systems (MEMS) technology. By integrating the tens of thousands of micro-thermocouple in a centimeter square...
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| Format: | Others |
| Language: | zh-TW |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41923516364963764672 |