Construct an Inter-Fab Transmission Model of Automated Material Handling System in Wafer Fabrication
碩士 === 國立清華大學 === 工業工程與工程管理學系碩士在職專班 === 99 === With the increase in the size and weight of wafers in semiconductor manufacturing, heavy work loading has become a critical ergonomic issue due to the majority of operators as female. In addition, the lagers the wafer size, the more narrow the CD unifor...
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| Format: | Others |
| Language: | zh-TW |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43777018002326817447 |