Growth of Ultrananocrystalline Diamond Films on Silicon and Tungsten Carbide Substrates Using Electrophoresis-deposited Nano-diamond Film as Nucleation Layer
碩士 === 國立清華大學 === 材料科學工程學系 === 99 === In this work, we report the utilization of nano-diamond layer electrophoresis-deposited on Si to perform as a nucleation layer for growing ultra-nanocrystalline diamond (UNCD) film using microwave plasma-enhanced chemical vapor deposition (MPECVD) system. The mo...
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| Format: | Others |
| Language: | zh-TW |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77635537197346134200 |