Fabricating insertion structures by nanoimprint lithography and its related applications
博士 === 國立清華大學 === 動力機械工程學系 === 99 === This research proposes a technique called insertion nanoimprint, which features transferring the metallic (in this thesis, we used Al/Cu) wire gratings fabricated on a silicon wafer into a dielectric (in this thesis, we used PMMA (PolyMethyl MethAcrylate)) subst...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65104768714831284611 |