Run-to-run control scheme for a mixed-run process with single tool and multiple products
碩士 === 國立清華大學 === 統計學研究所 === 99 === Exponentially weighted moving average (EWMA) controller has been widely used in semiconductor manufacturing processes. In the literatures, several papers addressed the efforts of long-term stability and short-term performance of EWMA control scheme. However, all t...
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| Format: | Others |
| Language: | zh-TW |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94620779000262420122 |