The Phase Transition and Corrosion Resistance of N-doped ZrO2 Thin Films Deposited by HCD-IP
碩士 === 國立清華大學 === 工程與系統科學系 === 99 === N-doped ZrO2 thin films were deposited respectively on Si (Si-series) and 304 stainless steel (SS-series) substrates using hallow cathode discharge ion-planting (HCD-IP). The objectives of the present study were to understand the effect of substrate materials o...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/10140402962895130015 |