Applications of Using Silicon Ion Implantation Techniques in Fabricating Phase Change Memory Materials

碩士 === 國立清華大學 === 工程與系統科學系 === 99

Bibliographic Details
Main Authors: Lee, Po-Hsiang, 李博祥
Other Authors: Liang, Jenq-Horng
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/35210488695150101578