Gate-All-Around Poly-Silicon Nanowires Flash Memory with Silicon Nanocrystals

碩士 === 國立清華大學 === 工程與系統科學系 === 99 === This thesis research topics for the Nonvolatile memory (NVM) that is based on a structure of Gate-All-Around (GAA) polycrystalline silicon (poly-Si) nanowires (NWs) structure with Silicon-Nanocrystals (NCs) as the storage nodes is demonstrated. The GAA poly-Si-S...

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Bibliographic Details
Main Authors: Tang, Zih-Yun, 唐紫橒
Other Authors: Wu, Yung-Chun
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/27048838712372131888