The thermal outgassing rate of the aluminum vacuum chambers venting to extremely dry nitrogen gas
碩士 === 國立清華大學 === 生醫工程與環境科學系 === 99 === Thermal outgassing rate measurements and residual gas analyses were used to study two aluminum-alloy chambers, which had different surface treatments. One chamber was machined with alcohol, and the other was extruded by using a diamond-tip die to provide smoot...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77361828781015061894 |