Statistical Optimization Modeling in Fabricating MOSFET Device
碩士 === 國立臺南大學 === 電機工程研究所 === 99 === In this thesis, a statistical optimization modeling is proposed to investigate the effect of the critical factors in the process of the 90nm and 65nm MOSFET devices. The electrical properties and correlation of the principal factors, are simulated based on explor...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28283107277902556659 |