The study of textured diamond films and improved adhesion via microwave plasma chemical vapor deposition
博士 === 國立臺灣大學 === 材料科學與工程學研究所 === 99 === The textured orientation of diamond films is elaborated by microwave plasma chemical vapor deposition (MPCVD) in 1200 W, 110 torr, CH4/H2=1/20, and 0.5-4.0 h deposition time. The special morphology revealed the rectangular structure stacked regularly on diamo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09049014749700522501 |