Preparation of Silicon Heterojunction solar Cells by VHF-PECVD System
碩士 === 國立臺灣科技大學 === 化學工程系 === 99 === In this thesis, we fabricated the intrinsic hydrogenated amorphous silicon/monocrystalline silicon (a-Si:H/c-Si) symmetrical heterostructure by PECVD . Emphasis was placed upon comparing the passivation property of the intrinsic a-Si:H layers. Also, the p-type hy...
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| Format: | Others |
| Language: | zh-TW |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/d8hmx2 |