Characteristics and Thermal Behavior of Sputtered Titanium Thin Films on Various Substrates
博士 === 國立臺灣科技大學 === 機械工程系 === 99 === Titanium films are growing in popularity, and are soon expected to replace copper for metallization purposes. However, the thermal stress behavior of titanium films had not been extensively studied, and therefore not clearly understood. Thus, the main goal of t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s4936x |