The Study of the MIS Device with Indium-Tin-Oxide sol-gel Thin Film and Its Characterizations
碩士 === 國立高雄大學 === 電機工程學系-工業技術整合產業研發碩士專班 === 99 === In this paper, indium tin oxide (ITO) solution was prepared by sol-gel method, and then ITO thin films was coated on the metal-insulator-semiconductor component by spin coating. Transparent conductive ITO film was applied to light detector component...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69857560137623478654 |