The study of transparent conducting properties of Al-doped ZnO films by using a magnetron sputtering method
碩士 === 國立高雄大學 === 應用物理學系碩士班 === 99 === In this thesis, we report effect of change to a different process by a fixed AZO target on the crystal structural, surface morphological, optical, chemical composition and electrical. All of the film samples were deposited using the magnetron sputtering method....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01725014131474254799 |