Microstructure and Characterization ofSputtered Ternary Ni-Ru-P Alloy Coatings
碩士 === 國立聯合大學 === 材料科學工程學系碩士班 === 99 === In the study, the ternary Ni-Ru-P alloy coatings are fabricated by magnetron dual-gun co-sputtering technique. The chemical composition variation of the coatings in terms of sputtering parameters, including input power, process temperatures and Ar gas flow ra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82863128421470179006 |