The study of aluminum induced crystallization in amorphous Si thin film
碩士 === 國立聯合大學 === 材料科學工程學系碩士班 === 99 === With the needs of industry, the reserch of amorphous Si transform to polycrystalline Si had been wildly researched. This study is about Aluminum induce crystallization. Al and Si thin films were prepared by DC and radio frequency (RF) magnetron sputtering m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67399222406546322489 |